Isolast? PureFab??FFKM

迈博体育 Sealing Solutions launches four best-in-class materials in its Isolast? PureFab? range specifically engineered for critical semiconductor sealing applications. For original equipment manufacturers & Fabs, utilizing these unique perfluoroelastomer (FFKM) formulations will provide an increased product yield and decrease process defects. In turn, this reduces downtime, extends product maintenance cycles, gives greater process tool uptime, and results in a lower total cost of ownership.
With excellent mechanical properties, all the ‘Fab Four’ semiconductor materials demonstrate the highest purity of their kind, without compromising plasma resistance, outgassing and thermal stability. Individually, the materials are best-in-class for specific characteristics:

Isolast? PureFab? JPF10 for remote plasma resistance with fully organic formulation
Isolast? PureFab? JPF20 for overall plasma resistance and minimal particulation in harsh environments
Isolast? PureFab? JPF21 for long-term thermal stability and low trace metal contamination
Isolast? PureFab? JPF30 for its market leading high temperature rating and extreme purity in a translucent material

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Features & Benefits of Isolast® PureFab?

High-temperature stability
Highest purity
Exceptionally low trace metal content
Outstanding plasma resistance
Best performance in aggressive front-end processes including deposition, etch, ash/strip, plasma cleaning, and thermal processing such as atomic layer deposition
Reduced particle generation and ultra-low outgassing performance in high vacuum conditions
Enables end-users to extend their product maintenance cycles while ensuring that process yield is maximized
All Isolast? PureFab? seals produced and packed in a Class 100 (ISO5) cleanroom environment to ensure purity of product

Our Isolast® PureFab? Porfolio

迈博体育 Sealing Solutions offers a unique and focused material portfolio to match process chemistry, system location and tool complexity:

Isolast® PureFab? JPF22

Superior chemical compatibility for a wide range of semiconductor applications

Reinforcing synthetic filler system maximizes mechanical performance
Extremely low leachables according to SEMI F40/F57
Excellent resistance to aggressive, amine-based chemicals
Low trace metal content leading to high process yield
Excellent chemical compatibility with common dry process gases in less critical processes
Minimum particulation and weight loss upon exposure to a wide range of plasma process gases

Isolast® PureFab? JPF40

Ultra-high temperature perfluoroelastomer for demanding subfab applications

Unique cross-linking chemistry provides a low compression set for long time periods ensuring sealing integrity
Unrivalled thermal stability up to +327°C/+620°F
Low outgassing properties
Very low trace metal contamination compared to other high temperature, black FFKMs
Excellent chemical compatibility with common dry process gases
Minimum particulation and weight loss upon exposure to a wide range of plasma process gases

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